Líneas de Investigación > Publicaciones SiGe Línea de SiGe

                        Grupo de Nuevos Materiales                                                                             

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Línea SiGe

Proyectos de Investigación Línea SiGe

Publicaciones Línea SiGe

Trabajos:
(PFC, Tesinas y Tesis)
Línea SiGe

Grupo Nuevos Materiales

Instalaciones y Equipamiento

 

Producción de semiconductores (SiGeC) y dieléctricos (SiON, alto-k) en capa delgada y el tratamiento de sus superficies a escala micro- y nanométrica

Publicaciones

       


 

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2006-2005

 
   
2004 -2000
 

1999 - 1995

 
   

< 1995

 
Algunas contribuciones tipo "poster" o "Extended Abstract" están disponibles en formato pdf para Acrobat Reader 5ó superior


 

2006-2005

 

 

 

2004 - 2000

 

1999 - 1995

 
   

< 1995

 

 
   

Artículos en revistas
El número entre paréntesis es el número total de artículos por año que hemos incluido en la lista (hasta ahora)

 

   

2006-2005 ( 5 artículos)

 

*

S.Chiussi, E.López, J.Serra, P.González, B.León
UV Laser Assisted Processing of Thin Silicon-Germanium-Carbon Films
Thin Solid Films 508 (2006) 48-52

  Abstract
  * E.López, S.Chiussi, U.Kosch, P.González, J.Serra, C.Serra, B.León
Compositional, Structural and Optical Properties of Si-Rich a-SiC:H Films Deposited by ArF-LCVD
Applied Surface Science 248 (2005) 113-117

  Abstract
 

*

J.C.Conde, P.González, F.Lusquiños, S.Chiussi, J.Serra, B.León
Finite elements analysis of heteroepitaxial SiGe layers grown by excimer laser
Applied Surface Science 248 (2005) 461-465

  Abstract
 

*

J.C.Conde, P.González, F.Lusquiños, S.Chiussi, J.Serra, B.León
Analytical and numerical calculations of the temperature distribution on Si and Ge induced by excimer lasers
Applied Surface Science 248 (2005) 455-460

  Abstract

*

E.López, S.Chiussi, P.González, J.Serra, C.Serra, B.León
Influence of the Substrate Temperature on the ArF Laser induced Chemical Vapour Deposition of Ge Containing Thin Films
Applied Surface Science 248 (2005) 108-112

  Abstract
         
         
   

2004 -2000 ( 7 artículos)

 

*

E.López, S.Chiussi, J.Serra, P.González, C.Serra, B.León, F.Fabbri, L.Fornarini, S.Martelli
Laser assisted integrated processing of SiGeC films on silicon
Thin Solid Films 453-454 (2004) 46-51
 
  Abstract
 

*

E.López, S.Chiussi, J.Serra, P.González, C.Serra, U.Kosch, B.León, F.Fabbri, L.Fornarini, S.Martelli
Growth and modification of thin SiGeC films at low substrate temperature through UV laser assisted processing
Applied Surface Science 234 (2004) 422-428

  Abstract
 

*

S.Chiussi, E.López, J.Serra, P.González, C.Serra, B.León, F.Fabbri, L.Fornarini, S.Martelli
Influence of Laser Fluence in ArF-Excimer Laser Assisted Crystallisation of a-SiGe:H Films
Applied Surface Science 208-209 (2003) 358-363

  Abstract
 

*

E.López, S.Chiussi, C.Serra, J.Serra, P.González, B.León, M.Pérez -Amor
ArF-Excimer Laser Induced Chemical Vapour Deposition of Amorphous Hydrogenated SiGeC Films
Applied Surface Science 208-209 (2003) 682-687

  Abstract
 

*

S.Chiussi, F.Fabbri, L.Fornarini, P.González, B.León, S.Martelli, E.López, C.Serra, J.Serra
Crystallisation of 500 nm Thick a-SiGe:H Films through ArF-Excimer Laser Radiation
SPIE-Proceedings ISNN 0277-786X, ISB 0-8194-5017-0, Vol. 5147 (2003) 204-21

  Abstract
 

*

S.Chiussi, C.Serra, J.Serra, P.González, B.León, S.Urban, G.Andrä, J.Bergmann, F.Falk, F.Fabbri, L.Fornarini, S.Martelli, F.Rinaldi
Laser Crystallisation of poly-SiGe for Microbolometers
Applied Surface Science 186 (2002) 166-172

  Abstract

*

N.Banerji, J.Serra, S.Chiussi, B.León, M.Pérez-Amor
Photo-induced Deposition and Characterization of Variable Bandgap a-SiN:H Alloy Films by Laser-CVD
Applied Surface Science 168 (2000) 52-56

  Abstract
         
       
   

1999 - 1995 ( 24 artículos)

   

 

< 1994 ( 28 artículos)
     
   

Contribuciones a congresos
El número entre paréntesis es el número total de contribuciones por año que hemos incluido (hasta ahora) en la lista

   

2005 ( 4 contribuciones)

 

*

S.Chiussi, E.López, F.Gontad, J.Serra, P.González, B.León
Excimer Laser Assisted Processing of Silicon-Germanium-Carbon Films
1st Int'l WorkShop on  New Group IV Semiconductor Nanoelectronics, Sendai (2005) Japón

 

(761kB)
Ext.Abstract

 

*

ICSI-4
S.Chiussi, E.López, J.Serra, P.González, B.León
UV Laser Assisted Processing of Thin Silicon-Germanium-Carbon Films
4th Int'l Conf. on Silicon Epitaxy and Heterostructures (ICSI-4) Awaji, Hyogo (2005) Japón

  (879kB)
 
*
RIVA-5
E.López, U.Kosch, S.Chiussi, F.Gontad, P.González, J.Serra, C.Serra, B.León
Tailored film properties and surface morphology of Si1-x-yGexCy films through ArF-Excimer Laser assisted growth
5th Iberian Vacuum Meeting and Applications, XI Spanish Vacuum Meeting, V Portuguese Vacuum Meeting, Guimarães, (2005) Portugal

  (426kB)

*

EMRS-05
Ch.B.Lioutas, N.Frangis, S.Soumelidis, S.Chiussi, E.López, B.León
High resolution electron microscopy study of SiGeC thin films grown on Si(100) by laser assisted techniques

European Materials Research Society Conference (EMRS), Strasbourg (2005) Francia


  (1543kB)
         
         
   

2004 -2000 ( 15 contribuciones)

 

*

NanoSpain 1 st Workshop
S.Chiussi , E.López, J.Serra, P.González, B.León, M.Pérez-Amor
Growth and Modification of Thin Films at Low Substrate Temperatures through UV Laser Assisted Processing
1 st NanoSpain Workshop, Phantoms Foundation, San Sebastian (2004) España

 
(1905kB)
 

*

EMRS-04
E.López, U.Kosch, S.Chiussi, F.Quintero , P.González, J.Serra, C.Serra, B.León
Tailored film properties and surface morphology of Ge containing films through ArF-Excimer Laser assisted growth
European Materials Research Society Conference (EMRS), Strasbourg (2004) Francia


 
(588kB)
 

*

ICPEPA-4
J.C.Conde, P.González, F.Lusquiños, S.Chiussi, J.Serra, B.León
Finite Elements Analysis of Heteroepitaxial SiGe Layers grown by Excimer Laser
4 th Int'l Conference on Photo-Excited Processes and Applications (ICPEPA-4), Lecce (2004) Italia

 
(148kB)
 

*

ICPEPA-4
J.C.Conde, P.González, F.Lusquiños, S.Chiussi, J.Serra, B.León
Analytical and Numerical Calculations on the Temperature Distribution on Si and Ge induced by Excimer Lasers
4 th Int'l Conference on Photo-Excited Processes and Applications (ICPEPA-4), Lecce (2004) Italia

 
(463kB)
 

*

ICPEPA-4
S.Chiussi, E.López, J.Serra, P.González, B.León
UV Laser Assisted Processing of Thin Silicon-Germanium-Carbon alloys
4 th Int'l Conference on Photo-Excited Processes and Applications (ICPEPA-4), Lecce (2004) Italia

  (1929kB)
 

*

ICPEPA-4
E.López, S.Chiussi, P.González, J.Serra, C.Serra, B.León
Influence of the Substrate Temperature on the ArF Laser induced Chemical Vapour Deposition of Ge Containing Thin Films
4 th Int'l Conference on Photo-Excited Processes and Applications (ICPEPA-4), Lecce (2004) Italia

 
(436kB)
 

*

ICPEPA-4
E.López, S.Chiussi, U.Kosch, P.González, J.Serra, C.Serra, B.León
Compositional, Structural and Optical Properties of Si-Rich a-SiC:H Films Deposited by ArF-LCVD
4 th Int'l Conference on Photo-Excited Processes and Applications (ICPEPA-4), Lecce (2004) Italia

 
(336kB)
 

*

EMRS-03
S.Chiussi, E.López, C.Serra, J.Serra, P.González, B.León, F.Fabbri, L.Fornarini, S.Martelli
Laser Assisted Integrated Processing of SiGeC Films on Silicon
European Materials Research Society Conference (EMRS), Strasbourg (2003) Francia

 
(653kB)
 

*

ICFSI-9
E.López, S.Chiussi, C.Serra, U.Kosch, J.Serra, P.González, B.León, F.Fabbri, L.Fornarini, S.Martelli
Growth and Modification of Thin SiGeC Films at Low Substrate Temperatures through UV Laser Assisted Processing
9th Int'l Conf. on the Formation of Semiconductor Interfaces (ICFSI-9), Madrid (2003) España

 
(602kB)
 

*

ICSI-3
T.Stimpel, F.Hutterer, H.Baumgärtner, I.Eisele, S.Chiussi, C.Serra, B.León
Silicon Overgrowth of Fullerene C60
3rd International Conference on SiGe(C) Epitaxy and Heterostructures (ICSI-3), Santa Fe (2003) Estados Unidos

  (228kB)
Ext.Abstract
 

*

EMRS-02
S.Chiussi, E.López, J.Serra, P.González, C.Serra, B.León, F.Fabbri, L.Fornarini, S.Martelli
Influence of Laser Fluence in ArF-Excimer Laser Assisted Crystallisation of a-SiGe:H Films
European Materials Research Society Conference (EMRS), Strasbourg (2002) Francia

 
(755kB)
 

*

EMRS-02
E.López, S.Chiussi, C.Serra, J.Serra, P.González, B.León, M.Pérez -Amor
ArF-Excimer Laser Induced Chemical Vapour Deposition of Amorphous Hydrogenated SiGeC Films
European Materials Research Society Conference (EMRS), Strasbourg (2002) Francia

 
(643kB)
 

*

ALT-02
F.Fabbri, L.Fornarini, S.Martelli,S.Chiussi, E.López, C.Serra, J.Serra, P.González, B.León
Crystallisation of 500 nm Thick a-SiGe:H Films through ArF-Excimer Laser Radiation
Advanced Laser Technologies ALT-02, Adelboden (2002) Suiza

 
(500kB)
 

*

EMRS-01
S.Chiussi, C.Serra, J.Serra, P.González, B.León, S.Urban, G.Andrä, J.Bergmann, F.Falk, F.Fabbri, L.Fornarini, S.Martelli, F.Rinaldi
Laser Crystallisation of poly-SiGe for microbolometers
European Materials Research Society Conference (EMRS), Strasbourg (2001) Francia

 
(978kB)

*

MRS-01
E.Faro, N.Banerji, J.Serra, S.Chiussi, B.León
Thermal Annealing Study of Variable Band Gap a-SiN:H Alloy Films
MRS-Spring-Meeting 2001, San Francisco (2001) Estados Unidos

   
         
       
   

1999 - 1995 ( 15 contribuciones)

   

 

   
< 1995 ( 32 contribuciones)
       
   
última actualización: 12-05-2006 (schiussi@uvigo.es)